发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes: a semiconductor substrate; an N-type MOSFET formed in a surface of the semiconductor substrate; a tensile stress film provided on the semiconductor substrate at least around a directly overlying region of a channel region of the N-type MOSFET and having tensile stress therein; and a compressive stress film provided in the directly overlying region of the channel region and having compressive stress therein.
申请公布号 US2009101945(A1) 申请公布日期 2009.04.23
申请号 US20080252134 申请日期 2008.10.15
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMAGUCHI RIE;FUJII OSAMU
分类号 H01L23/00 主分类号 H01L23/00
代理机构 代理人
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