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发明名称
PATTERNING METHOD
摘要
申请公布号
EP1516228(B1)
申请公布日期
2009.03.18
申请号
EP20030727822
申请日期
2003.05.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
MICHEL, BRUNO;ROTHUIZEN, HUGO, E.;VETTIGER, PETER;BONA, GIAN-LUCA;BIEBUYCK, HANS
分类号
G02B5/18;G03F7/00;G03F9/00
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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Wertdokument
2-AZABICYCLO[2.2.1]HEPTAN-DERIVATE, IHRE HERSTELLUNG UND IHRE ANWENDUNG
