| 摘要 |
PROBLEM TO BE SOLVED: To facilitate a diameter change, an exchange, and mounting and dismounting of an orifice arranged above and below a sample chamber (an incident side and an emitting side of an electron beam) in a charged particle beam device such as a transmission electron microscope (TEM). SOLUTION: The charged particle beam device comprises upper and lower magnetic poles 18, 19 forming the sample chamber 113, orifices 35, 36 made of a metal foil or a metal plate having a plurality of holes 41 and arranged by covering an opening facing the sample chamber 113 of at least one of the electron beam passage holes 21, 22 among the upper and lower magnetic poles 18, 19, pressing mechanisms 48, 51, 52 supporting the orifices 35, 36 by being pressed to the magnetic poles 18, 19 and releasing pressure to the magnetic poles 18, 19 of the orifices 35, 36 by an operation at the outside of a mirror cylinder 101, and an orifice operation mechanism 54 for performing a slide operation of the orifices 35, 36 in a direction orthogonal to a path of an electron beam 103 on the basis of an operation at the outside of the mirror cylinder 101. COPYRIGHT: (C)2009,JPO&INPIT
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