HIGH RESOLUTION CIRCUIT FOR CAPACITANCE-TO-TIME DEVIATION

摘要

A capacitance to time converting circuit with high resolution is provided to generate a time signal with high resolution by generating the time signal with a pulse width having amplified time difference after amplifying time difference corresponding to capacitance variation of a MEMS sensor. A capacitance to time converting circuit includes a driving signal generator(10), a capacitance difference sensor(20), a time difference amplifier(30), and a time signal generator(40). The driving signal generator generates a driving signal and applies the driving signal to the capacitance difference sensor. The capacitance difference sensor generates two sensing signals with the time difference corresponding to the capacitance variation of a MEMS(Micro Electro Mechanical System). The time difference amplifier amplifies the time difference of two sensing signals. The time signal generator generates a time signal with the pulse width corresponding to the amplified time difference.