| 摘要 |
A plasma processing system and a control method are provided to enhance the progress throughput by overcoming the ignition failure although the error is generated in the plasma ignition. A cleaning process is initiated(S100). Whether the cooling water is normally provided or not is checked out(S110). The purifying gas is supplied and the inside of the plasma reactor is purified(S120). The basic pumping is made up to the fire pressure while the firing gas is supplied to the plasma reactor(S130). A controller initializes the value(n) to 1(S140). The controller controls the radio frequency generator and the plasma reactor, and the plasma ignition is attempted(S141). Whether the plasma ignition is normally performed or not in the plasma reactor is determined(S142). In case the plasma ignition is not normally comprised, the value(n) is increased(S144). The system controller is notified the fire error(S145). Normally, if the fire is made, the cleaning gas is supplied(S160). The washing of the chamber is made by the active gas(S170).
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