| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure-detecting element that is enhanced of the accuracy of pressure detection, without varying the sensitivity, even at high humidity. SOLUTION: When pressure Po from the outside is applied via a pressure transmission section 1, a deflection amount adjusting section 3 adjusts the force applied to a pressure-detecting section 2 for suppressing reduction of response voltage V during moisture absorption. In a conventional pressure-detecting element that does not have deflection amount adjusting section 3, the deflecting region of the pressure-detecting section 2 is reduced due to moisture absorption, and the response voltage is reduced. In the pressure-detecting element, however, by having the elasticity modulus of the deflection amount adjusting section reduced by moisture absorption, the force transmitted from the outside to the pressure-detecting section increases, and thus the reduction of the response voltage is suppressed. COPYRIGHT: (C)2009,JPO&INPIT
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