| 摘要 |
PROBLEM TO BE SOLVED: To provide an easily manageable and operable manufacturing method of a polarization conversion element that can easily form a retarder, made of thin quartz crystal on a polarization separation element. SOLUTION: An etching stop layer 13 is formed on one face of the polarization separation element 11. A quartz retardation plate 120 having a 1/2λretardation function is equipped to the surface of the etching stop layer 13. A resist 14 is patterned on the surface of the quartz retardation plate 120. Then etching is carried out by reactive ion etching in a region which is not covered, in the resist 14. The resist 14 on the 1/2λretardation plate 12, which is divided into multiple portions, is peeled off by a photoresist-peeling agent, such as acetone. In this way, the polarization conversion element 10, having the 1/2λretardation plate 12 which is the single plate-shaped quartz retardation plate 12 divided into multiple stripe-shaped portions, is completed on the polarization separation element 11. COPYRIGHT: (C)2009,JPO&INPIT
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