| 摘要 |
PROBLEM TO BE SOLVED: To enable inspection of unevenness of the surface of a film with high precision. SOLUTION: The device for inspecting a film includes a guide member 3 for guiding the film F in a state of non-contact; a lighting means for illuminating inspection light to the surface Fa of the film F; and an imaging means for imaging the surface Fa of the film F. The guide member 3 has a guide surface 31 which is opposite to the backside Fb of the film F; a plurality of air chambers 32; and a communication path from these air chambers 32 to the guide surface 31.In addition, the device for inspecting a film has a pressure control unit which controls each pressure in the plurality of air chambers 32. COPYRIGHT: (C)2009,JPO&INPIT
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