发明名称 LOCKING APPARATUS OF SEMICONDUCTOR DEVICE TEST HANDLER
摘要 PURPOSE: A locking apparatus is provided to secure a stability by making a hydraulic/pneumatic cylinder have a locked state although any operating power is forced during equipment operation. CONSTITUTION: An open port(OP) and a close port(CP) are installed at front and rear parts of a cylinder(1) and are connected to a main control valve(2) via the first and second hydraulic lines(5,6). The main control valve(2) is connected to a solenoid valve(3) via intermediate supply line(7) and return lines(8). The solenoid valve(3) is connected to a pneumatic supply source(Po) by a supply line(9) and to external discharge openings(D1,D2) by the first and second return lines(10,11). The first check valve(7a) is installed at the intermediate supply line(7) to allow pneumatic flow into the main control valve. The second check valve(8a) is installed at the return valve(8) to allow pneumatic flow returned to the solenoid valve(3). A return bypass line(13) is connected to the supply line(7) to connect the first hydraulic line(5) directly to the solenoid valve(3). A supply bypass line(12) is connected to the return line(8) to connect the second hydraulic line(6) directly to the solenoid valve(3). The third check valve(13a) is installed at the return bypass line(13) to allow pneumatic flow returned into the solenoid valve. The fourth check valve is installed at the supply bypass line(12) to allow pneumatic flow supplied from the solenoid valve to the second hydraulic line(6).
申请公布号 KR20030040676(A) 申请公布日期 2003.05.23
申请号 KR20010071086 申请日期 2001.11.15
申请人 MIRAE CORPORATION 发明人 LEE, EUNG RYONG
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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