METHOD FOR FABRIACTING CAPACITOR WITH HIGH ASPECT RATIO CYLINDER STORAGENODE

摘要

A manufacturing method of a capacitor including cylinder charge storage electrodes of high aspect ratio is provided to maintain a necessary amorphous carbon mesh structure in a cell region with altogether removing a amorphous carbon layer of a peripheral circuit area in a blanket etching process by depositing the amorphous carbon layer by a spin-on coating type. A sacrificing layer is formed at the upper part of a substrate(21) in which a cell region and peripheral circuit area are equipped. A plurality of hole patterns is formed in the cell region by etching the sacrificing layer. Charge storage electrodes(25) of a cylinder type are formed inside the hole patterns respectively. The top of the charge storage electrodes is exposed by removing a part of the sacrificing layer. An amorphous carbon layer is formed by using a spin on coating mode at a whole side including the charge storage electrode in which the top is exposed. An amorphous carbon layer pattern(26B) catching the exposed top of the charge storage electrode in which the amorphous carbon layer is blanket etched and which is adjacent is formed. The sacrificing layer is altogether removed. The amorphous carbon layer pattern is removed.