| 摘要 |
PROBLEM TO BE SOLVED: To enhance reproducibility in an alignment layer forming device for forming an alignment layer by obliquely depositing a material of a deposition source on a substrate. SOLUTION: In the alignment layer forming device for forming the alignment layer by obliquely depositing a prescribed material on a substrate 10A under a vacuum condition using the deposition source 302 made of the prescribed material, the deposition source 302 is made of the material composed of cyclophenes. COPYRIGHT: (C)2008,JPO&INPIT
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