| 摘要 |
PURPOSE: A substrate processing apparatus and a method for transferring substrate of the same are provided to improve productivity by performing transfer for a plurality of substrates at the same time a plurality of substrate transfer parts. CONSTITUTION: A plurality of chambers(601 to 608) process substrates. Containers containing a plurality of substrates is loaded on load ports(411, 412). A plurality of substrate transfer parts transfers substrates between the containers and the chambers. The containers are placed on buffer ports(210, 220). A container transfer part loads the container from the buffer ports to the one of the load ports.
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