| 摘要 |
PURPOSE: A cathode of a sputtering device is provided to prevent a target from being burned on the bent portion of a target clamp even if the target melts during the thermal expansion. CONSTITUTION: A cathode of a sputtering device comprises a target(100), a cooling plate(300), a back plate(400), a sealing member, a back plate clamp(600), a target clamp(700), and a clamp bolt. The target comprises a deposition material consumed for deposition. The cooling plate is arranged on one side of the target and allows a cooling water flow therein. The back plate is arranged between the cooling plate and the target and blocks the inside of the cooling plate. The sealing member is interposed between the back plate and the cooling plate and seals the cooling plate. The back plate clamp is pressed on the lateral surfaces of the target and connected to the top of the back plate. The target clamp is arranged on the top of the back plate clamp and the target clamp and prevents the movement of the target.
|
