A coating apparatus for mass production by using a loading and unloading Multi substrate holder,申请号KR20070100319-传众专利搜索

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发明名称	A coating apparatus for mass production by using a loading and unloading Multi substrate holder
摘要
申请公布号	KR100945429(B1)	申请公布日期	2010.03.05
申请号	KR20070100319	申请日期	2007.10.05
申请人		发明人
分类号	C23C14/34;C23C14/00;C23C14/24	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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