Pattern aligning method, verifying method, and verifying device

摘要

A pattern alignment method performs alignment of a comparison source pattern or a comparison target pattern that has been subjected to angle-scale conversion with the comparison source pattern. Angular deviations and scale factors between the comparison source pattern and the comparison target pattern are computed separately (S14, S16), and after angle and scale conversion (S18), the measured template matching is performed. Therefore, parallel-displacement alignment (S20) can be made faster and precise alignment is possible. Template matching processing can be minimized, and alignment can be performed precisely and rapidly.