METHOD AND DEVICE FOR CLEANING AIR,申请号EP20020741307-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CLEANING AIR
摘要
申请公布号	EP1400761(B1)	申请公布日期	2010.05.12
申请号	EP20020741307	申请日期	2002.06.26
申请人	NICHIAS CO., LTD.;TOKYO ELECTRON LIMITED	发明人	TERADA, ISAO;TANAKA, MINORU;MATUMURA, YUJI;KOBAYASHI, SADAO;MORI, NAOKI;ITOH, HIROMU;WAKAYAMA, YOSHIHIDE;SUENAGA, OSAMU
分类号	F24F7/06;B01D47/00;B01D53/75;F24F3/14	主分类号	F24F7/06
代理机构		代理人
主权项
地址

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