发明名称 |
Out-of-plane spring structures on a substrate |
摘要 |
A structure has at least one structure component formed of a first material residing on a substrate, such that the structure is out of a plane of the substrate. A first coating of a second material then coats the structure. A second coating of a non-oxidizing material coats the structure at a thickness less than a thickness of the second material.
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申请公布号 |
US7713388(B2) |
申请公布日期 |
2010.05.11 |
申请号 |
US20060364111 |
申请日期 |
2006.02.27 |
申请人 |
PALO ALTO RESEARCH CENTER INCORPORATED |
发明人 |
CHUA CHRISTOPHER L.;HANTSCHEL THOMAS;FORK DAVID K.;VAN SCHUYLENBERGH KOENRAAD F.;YANG YAN YAN |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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