| 摘要 |
<p>PURPOSE: A flow control device, a method for inspecting the same, and a flow control method are provided to compensate flow rate of a flow channel when a difference, which is not ignorable, in relation to setting a flow rate. CONSTITUTION: A flow control device is composed of a flux detection unit(5), a flow control valve unit(7), and a control unit(8). The flux detection unit detects a flow rate through the flow channel(4). The flow control valve unit is installed in the flow channel, and the flow control valve unit controls the flow rate by changing the degree of valve opening by the valve operation control information. The control unit receives at least one kind of flow setting of the at least from an external system(9).</p> |
