发明名称 |
Generation of a library of periodic grating diffraction signals |
摘要 |
A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.
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申请公布号 |
US7593119(B2) |
申请公布日期 |
2009.09.22 |
申请号 |
US20070866408 |
申请日期 |
2007.10.02 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
NIU XINHUI;JAKATDAR NICKHIL |
分类号 |
G01B11/14;G01N21/00;G01B11/24;G01N23/20;G02B5/18;G03F9/00;H01L21/027;H01L21/66 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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