| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic thin film manufacturing device and method capable of efficiently forming a high-precision organic thin film by using a relatively simple optical system, and reducing manufacturing cost because a transferring substrate can be reused. SOLUTION: A laser deposition device 10 of this organic thin film manufacturing device 100 includes a laser light source 11 for oscillating a laser beam in a specific wavelength range, a substrate 1 for laser deposition/transfer, a deposition chamber 15, and a vacuum device 19. The substrate 1 for laser deposition/transfer includes: a support substrate 2; a first photothermal conversion layer 3 formed in a predetermined pattern, and efficiently absorbing a laser beam in a first wavelength region; a second photothermal conversion layer 4 formed to cover the upper surface of the first photothermal conversion layer 3, reflecting the laser beam in the first wavelength range and absorbing a laser beam in a second wavelength region; and a transfer layer 5. COPYRIGHT: (C)2009,JPO&INPIT
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