| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device having improved inspection efficiency. SOLUTION: This surface inspection device includes a holding part for holding a wafer, an imaging part 30 and an image processing part 40 for performing surface inspection on a peripheral part or near the peripheral part of the wafer held by the holding part, and a driving mechanism for rotating relatively the wafer held by the holding part with respect to the imaging part 30. The surface inspection device constituted so that the wafer held by the holding part is rotated relatively by the driving mechanism, and surface inspection is performed in a prescribed inspection range on the peripheral part or near the peripheral part of the wafer, has a storage part 52 for storing a prescribed inspection related position on the wafer inputted from the outside, and a control part 50 for determining the prescribed inspection range based on the inspection related position stored in the storage part 52. COPYRIGHT: (C)2009,JPO&INPIT
|
