| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dresser having a reduced abrasive grain diameter, meeting the requirements of both high pad grinding force and pad flatness by controlling the intervals between abrasive grains within a predetermined range according to the abrasive grain diameter, and free from the falling of abrasive grains. <P>SOLUTION: In this dresser for an abrasive cloth, a plurality of abrasive grains are fixed, in a single layer, onto the surface of a metal supporting member. The surface of the metal supporting member onto which the abrasive grains are fixed is formed in a projecting shape. The difference between the end of the surface and the height of the center thereof is 3-40 μm. Where the diameter of the abrasive grains is d and the center-to-center distance between the adjacent abrasive grains is L, the L between at least one set of adjacent abrasive grains is d≤L≤2d. The diameter d of the abrasive grains is desirably 3≤d<100 μm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
