GRAPHITE MEMBER FOR ION IMPLANTING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce dust-raising in an ion implanting device by preventing: the slipping-out of graphite particles from a graphite member used as an inner component of the ion implanting device such as a flight tube various slits an electrode an electrode cover a guide tube and a beam stop; and the peeling of pyrolytic carbon accumulated on the member.

SOLUTION: The heat resistant impact coefficient of the graphite member for the ion implanting device is set to 54-96 kW/m. The ash content in the graphite member for the ion-implanting device is made ≤20 ppm to reduce the dust occurrence in the ion-implanting device.

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