METHOD FOR MANUFACTURING PATTERNED MAGNETIC RECORDING MEDIUM

摘要

A manufacturing method of a pattern magnetic recording medium for improving a removing method of a register is provided to dissolve resist stripping agent solution by irradiating excimer VUV. An excimer VUV laser is irradiated in the resist film on the magnetic layer or the protective layer under the pressure. The etching resist is coated with on the laminate including a substrate(1), a magnetic layer(3), a first protective layer(4) and a resist film(5) is formed. The resist film is patterned and the etching pattern is formed. The magnetic layer and the first protective layer are etched according to the etching pattern. The excimer VUV laser is irradiated in the resist film. The resist film is and removes cleaned by using the resist stripping agent solution. The excimer VUV laser comprises the xenon eximer VUV laser irradiating the VUV line.