METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE
摘要
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
申请公布号
WO2011068905(A2)
申请公布日期
2011.06.09
申请号
WO2010US58607
申请日期
2010.12.01
申请人
BRUKER NANO, INC.;HU, YAN;HU, SHUIQING;SU, CHANMIN;SHI, JIAN;MA, JI