| 摘要 |
PROBLEM TO BE SOLVED: To provide an air spindle having an improved thrust load capacity while holding desired accuracy. SOLUTION: In the air spindle 1, a stator 3 as a thrust-direction air jetting means and a radial-direction air jetting means is fixed to a housing 2. The stator 3 has an upper air jetting face 3a, a lower air jetting face 3b, and an inner-diameter air jetting face 3c formed on the upper face, the lower face, and the inner-diameter face, respectively. Around the outer periphery of the upper air jetting face 3a, a plurality of, for example, six pad type air bearings 11-16 as outer periphery side load capacity generating means are uniformly arranged. The pad type air bearings 11-16 supports a plane flush with a thrust plate 6. COPYRIGHT: (C)2011,JPO&INPIT |
