| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mirror attachment and detachment device for changing the mirror of an illumination optical system, without directly touching the mirror. <P>SOLUTION: The mirror attachment and detachment device 1 is configured such that a plurality of supporting parts 6 fitted to a planar mirror 4 are fixed to a casing 9 via a supporting mechanism 7, and the planar mirror 4 of a mirror curvature adjustment mechanism 5 for adjusting the mirror curvature by the supporting mechanism 7, is attached and detached. The device is formed of a surface member 2 covering the surface part of the planar mirror 4 and a rear member 3 covering the rear surface part of the planar mirror 4, and is formed attachably/detachably to the supporting mechanism 7 in a state of covering the planar mirror 4 by the surface member 2 and the rear member 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |
