| 摘要 |
A radiation detector with an integrated collimator. The collimator may be deposited on an anode or cathode face of the radiation detector. An insulating material may be deposited between the collimator and the radiation detector if the collimator is deposited on the anode side. The collimator may be comprised of a single layer or of multiple layers. Patterning and etching may be used to create an aperture in the collimator to allow x-rays to impinge on a full charge collection region of the radiation detector intrinsic region.
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