Agent useful for removing metallic, semimetallic or ceramic deposit, preferably of silicon nitride, from surface on which it is disposed, comprises composition comprising nitric acid, ammonium fluoride, acetic acid, and/or propane-1,2-diol

摘要

Agent comprises a composition comprising nitric acid, ammonium fluoride, carboxylic acid, preferably acetic acid, and/or glycol, preferably propane-1,2-diol. An independent claim is also included for removing metallic, semimetallic and/or ceramic deposits, preferably silicon nitride deposits, from surfaces on which the deposits are disposed, comprising applying the above agent on the deposits.