MICRO FORCE SENSOR AND MICRO FORCE MEASUREMENT METHOD USING DOUBLE ENDED FORK VIBRATION

摘要

PURPOSE: A micro force sensor and micro force measuring method which uses the vibration of double ended turning fork are provided to implement high resolution by sensing resonant frequency through the displacement of beam. CONSTITUTION: A probe(10) is fixed to a supporting unit and reacts the force. A double beam(30) has first resonance frequency which is transformed by the force. A vibrator(40) includes a frequency control unit and the double beam by the voltage. A light source unit(50) includes light source, optical fiber, and a frequency comparator. A control unit(60) calculates the force through the comparison of a first resonance frequency.