发明名称 |
MEMS structure with metal protection rings |
摘要 |
A microelectromechanical system (MEMS) structure and a fabricating method thereof are described. The MEMS structure includes a fixed part and a movable part. The fixed part is disposed on and connects with a substrate. The movable part including at least two first metal layers, a first protection ring and a first dielectric layer is suspended on the substrate. The first protection ring connects two adjacent first metal layers, so as to define a first enclosed space between the two adjacent first metal layers. The first dielectric layer is disposed in the enclosed space and connects the two adjacent first metal layers. |
申请公布号 |
US7851975(B2) |
申请公布日期 |
2010.12.14 |
申请号 |
US20080202563 |
申请日期 |
2008.09.02 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
LAN BANG-CHIANG;WANG MING-I;HO LI-HSUN;WU HUI-MIN;CHEN MIN;HUANG CHIEN-HSIN;SU TZUNG-I |
分类号 |
H01L41/08;H01L27/20 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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