发明名称 THIN SUBSTRATE FABRICATION USING STRESS-INDUCED SUBSTRATE SPALLING
摘要 A method for manufacturing a thin film direct bandgap semiconductor active solar cell device comprises providing a source substrate having a surface and disposing on the surface a stress layer having a stress layer surface area in contact with and bonded to the surface of the source substrate. Operatively associating a handle foil with the stress layer and applying force to the handle foil separates the stress layer from the source substrate, and leaves a portion of the source substrate on the stress layer surface substantially corresponding to the area in contact with the surface of the source substrate. The portion is less thick than the source layer. The stress layer thickness is below that which results in spontaneous spalling of the source substrate. The source substrate may comprise an inorganic single crystal or polycrystalline material such as Si, Ge, GaAs, SiC, sapphire, or GaN. In one embodiment the stress layer comprises a flexible material.
申请公布号 US2010311250(A1) 申请公布日期 2010.12.09
申请号 US20100784688 申请日期 2010.05.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BEDELL STEPHEN W.;FOGEL KEITH E.;LAURO PAUL A.;SADANA DEVENDRA
分类号 H01L21/30 主分类号 H01L21/30
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