| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor drive device (XY stage) of which operation is stabilized by maintaining a press applied to an ultrasonic vibrator constant even if adding a mounted article to a body to be driven. <P>SOLUTION: The ultrasonic motor drive device includes a plurality of ultrasonic vibrators that simultaneously excite longitudinal vibration and bending vibration to generate an elliptical vibration, and use the elliptical vibration as a driving force to drive the body to be driven. The ultrasonic motor drive device includes a driving element that is provided in each ultrasonic vibrator so that the driving element opposes the body to be driven, abuts on the body to be driven, and drives the body to be driven in an arbitrary direction in a plane, a press detection unit for detecting a press operating between the body to be driven and the ultrasonic vibrator and a press adjustment unit for adjusting press to prescribed press, based on results detected by the press detection unit. <P>COPYRIGHT: (C)2011,JPO&INPIT |
