CONDITIONER FOR CHEMICAL MECHANICAL POLISHING APPARATUS,申请号KR20080106506-传众专利搜索

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发明名称	CONDITIONER FOR CHEMICAL MECHANICAL POLISHING APPARATUS
摘要
申请公布号	KR100999445(B1)	申请公布日期	2010.12.09
申请号	KR20080106506	申请日期	2008.10.29
申请人		发明人
分类号	H01L21/304;H01L21/02	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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