METHOD OF FORMING OXIDE FILM, ELECTROWETTING DEVICE, LIQUID LENS DEVICE, DROPLET DEVICE, OPTICAL ELEMENT, ZOOM LENS, IMAGING DEVICE, OPTICAL MODULATOR, DISPLAY DEVICE, AND STROBOSCOPIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a dielectric layer having high adhesion even to a resin substrate or a substrate having a complicated surface shape or the like, and to provide an electrowetting device or a liquid lens having the dielectric layer formed thereon.

SOLUTION: A tungsten suboxide film is formed on a substrate, and a metal film is formed on the tungsten suboxide film. Then, the metal film surface is subjected to anodic oxidation to form the dielectric layer.

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