| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharge method and apparatus which makes the discharge amount of a liquid substance more uniform. SOLUTION: The droplet discharge method includes a scanning process which repeats the following processes a predetermined number of times: a correction process of correcting the discharge amount of the liquid substance discharged from a nozzle N, a process of moving the liquid substance a droplet discharge head 15 by a predetermined distance Y1 toward a mother substrate 51 along the direction of Y, and a process of discharging the liquid substance while moving the droplet discharge head 15 to mother substrate 51 along the direction of X. In the correction process, the discharge amount is corrected so that the discharge amount distributions of the liquid substance calculated from the mean value of the discharge amounts between at least adjacent nozzles N in a nozzle row NA have approximately similar properties, and a plurality of the nozzles N are divided into a plurality of groups. In the scanning process, the droplet discharge head 15 is moved to the mother substrate 51 along the direction of Y so that the width of one fixed group among a plurality of the groups is integral multiple of a predetermined distance Y1. COPYRIGHT: (C)2011,JPO&INPIT |
