CLEANING DEVICE AND CLEANING METHOD

摘要

A cleaning device (1) performs a cleaning of an article by blowing a cleaning medium (5) by an air stream onto the article (4). The cleaning device (1) includes a cleaning tank (6) that forms a space for the cleaning medium (5) to be blown, which includes an opening; a holding unit (3) that holds the article (4) at the opening; a pool member (19) that is arranged on an outer edge of the opening with a clearance between the pool member (19) and the article (4); and a cleaning-medium collecting unit (8) that brings the cleaning medium (5) leaked out of the outer edge and accumulated in the clearance back into the cleaning tank (6).