| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection method of a test piece in an electron microscope. <P>SOLUTION: A test piece carrier 500 has electrodes 504, 507 which are connected to pads 505, 508. The test piece is installed on a region A. After installing the test piece on the test piece carrier, a conductive pattern is deposited on the test piece. Thereby, it becomes possible to impress a voltage or current on a specific portion of the test piece. Deposition of the pattern on the test piece may be carried out by, for example, a beam inducing deposit or an ink jet print. This may apply on the construction of an electronic component in the test piece, for example, an active element such as an resistor, capacitor, inductor, and FET. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
