| 摘要 |
PROBLEM TO BE SOLVED: To prevent a mounting head or conveyance chute from being damaged in an abnormal stop state during retooling of a backup pin is performed by means of a transfer nozzle. SOLUTION: When a substrate assembly operation device is brought into an abnormal stop state due to an operation of an abnormal stop switch 41 or the like while a transfer nozzle 5B holds a backup pin 15 during retooling of the backup pin 15 is performed by means of the transfer nozzle 5B holding the backup pin 15, a vacuum switching valve 43 is switched so that the vacuum suction hold operation of the transfer nozzle 5B is released, and thereby the backup pin 15 is removed from the transfer nozzle 5B. COPYRIGHT: (C)2011,JPO&INPIT |
