| 摘要 |
PROBLEM TO BE SOLVED: To reduce Q values of vibration of a weight part and a beam part of a vibration type angular velocity sensor. SOLUTION: The vibration type angular velocity sensor includes: a package; an annular support part whose bottom part is bonded to the package; the weight part positioned inside the support part; the beam part for connecting an upper part of the support part to an upper part of the weight part; a piezoelectric element for driving and a piezoelectric element for detection formed on the beam part; a flexible layer on which a slit separating the upper part of the support part from the upper part of the weight part is formed, and constituting the upper part of the support part, the upper part of the weight part, and the whole of the beam part; and an inflexible layer which is thicker than the flexible layer, separating a lower part of the support part from a lower part of the weight part, forming a circular aperture communicated with the slit, and constituting the lower part of the weight part and the lower part of the support part. The width of the slit separating the support part from the weight part is narrower than the width of the aperture separating the support part from the weight part. COPYRIGHT: (C)2011,JPO&INPIT
|
