OPERATION CONTROL DEVICE AND OPERATION CONTROL METHOD FOR VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To prevent a vacuum pump from stopping during a manufacturing process by detecting the state of the products deposited in the casing of the vacuum pump during the startup of the vacuum pump, and according to the state, outputting a maintenance signal for attracting the attention of the user of the maintenance of the vacuum pump.SOLUTION: This operation control device 9 for controlling the operation of a vacuum pump with a pump rotor which is rotatably disposed in a casing includes a frequency converter 11 for controlling the rotational speed of the pump rotor. The frequency converter 11 includes a calculation part 14 for calculating an integral value by integrating a motor output torque during the startup of the vacuum pump and a storage parts 15 for storing a reference value corresponding to the integral value and a preset threshold.