INSPECTION APPARATUS EMPLOYING WIDE ANGLE OBJECTIVE LENS WITH OPTICAL WINDOW

摘要

PROBLEM TO BE SOLVED: To facilitate best performance for imaging an object placed in a separate environment with an optical window.

SOLUTION: An optical window can be placed in a particle detection system which includes a separator between a first environment and a second environment. The separator includes an opening and an optical element located in the opening. An object is located in the second environment. An objective lens is located in the first environment. A detector is located in the second environment and configured to detect a particle on the surface of the object.

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