发明名称 PATTERNING METHOD OF GRAPHENE USING MICROFLUIDIC SYSTEMS
摘要 <p>PURPOSE: A method for patterning graphene using a micro fluidic channel system is provided to form graphene patterning of various types by reducing graphene oxide according to a channel shape. CONSTITUTION: A graphene oxide layer is formed on the top of a substrate. A micro fluidic channel layer is formed on the graphene oxide layer. An insulating layer is formed on the top of the substrate. The micro fluidic channel layer positions a metal wire in both entrances of a channel. The micro fluidic channel layer is composed of polymer or glass materials. Graphene oxide resolves into grapheme by adding heat on the channel site of a micro fluidic channel system. Liquid metal or ionic liquid are injected in the channel.</p>
申请公布号 KR20120016990(A) 申请公布日期 2012.02.27
申请号 KR20110053719 申请日期 2011.06.03
申请人 CHUNG-ANG UNIVERSITY INDUSTRY-ACADEMY COOPERATIONFOUNDATION 发明人 KIM, SOO YOUNG;CHANG, SUK TAI;KIM, SUNG TAE;PARK, YEON SIL;KO, YOUNG UN;CHOI, KYOUNG SOON;CHO, SUNG RHEB
分类号 H01L21/02;G01N27/00;H01L21/027 主分类号 H01L21/02
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