发明名称 Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses
摘要 A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval &Dgr;t0, so that the electrode finally receives a voltage pulse of duration &Dgr;t0.
申请公布号 US8276210(B2) 申请公布日期 2012.09.25
申请号 US200913130520 申请日期 2009.10.13
申请人 VURPILLOT FRANCOIS;BOSTEL ALAIN;CAMECA;CNRS 发明人 VURPILLOT FRANCOIS;BOSTEL ALAIN
分类号 G01Q60/00 主分类号 G01Q60/00
代理机构 代理人
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