| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drive unit for optical deflectors capable of swinging a mirror section, thereby suppressing an occurrence of high frequency vibration of the mirror section while avoiding excessive shortening of a period for linearly changing a deflection angle of the mirror section. <P>SOLUTION: Piezoelectric actuators 10a and 10b for swinging a mirror section 1 around a swinging axis X2 are configured by connecting a plurality of piezoelectric cantilevers 3(i) (i=1, 2, 3, and 4). A drive voltage for piezoelectrically driving any one of an even-number-th piezoelectric cantilever 3 (an even number) and an odd-number-th piezoelectric cantilever 3 (an odd number) from any one side of one end and the other end of the piezoelectric actuators 10a and 10b is a voltage signal with a waveform obtained by synthesizing two sawtooth voltage signals, with the phase deflected by a predetermined phase difference. The drive voltage for piezoelectrically driving the other of the piezoelectric cantilever 3 (the even number) and the piezoelectric cantilever 3 (the odd number) has a waveform of an inverse phase to the drive voltage for piezoelectrically driving the one. <P>COPYRIGHT: (C)2013,JPO&INPIT |
