| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin-film solar cell substrate capable of realizing a thin-film solar cell with excellent photoelectric conversion efficiency, reliability, and productivity, and a manufacturing method of a thin-film solar cell. <P>SOLUTION: A manufacturing method of a thin-film solar cell substrate having an electrode layer which is composed of a conductive material and has a concave-convex shape on its surface comprises: a first step of depositing a conductive material film on the substrate to form the electrode layer; a second step of dispersively arranging a plurality of particles on the electrode layer; a third step of forming a first concave-convex part on a surface of the electrode layer by isotropically etching the surface of the electrode layer and the particles using the particles as a mask; and a fourth step of forming a second concave-convex part smaller than the first concave-convex part on a surface of a convex part in the first concave-convex part by wet-etching the surface of the first concave-convex part under the condition that the etching rate of a concave part in the first concave-convex part becomes lower than the etching rate of the convex part in the first concave-convex part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
