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发明名称
SAIRISUTA NO REETOKOKASOKUTEIHOHO NARABINI SOCHI
摘要
申请公布号
JPS5136876(A)
申请公布日期
1976.03.27
申请号
JP19740109536
申请日期
1974.09.25
申请人
HITACHI LTD
发明人
SUZUKI MASAYOSHI
分类号
G01R31/26;H01L21/66;H01L29/74
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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