| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve measurement accuracy for information on the inner side of a recess. <P>SOLUTION: A shape measuring apparatus with an image pickup device 5 and multiple optical elements includes: an imaging optical system 6 for forming a conjugate surface 10 conjugate to the image pickup device 5 in such a manner that the angle formed by the conjugate surface 10 is made in a relation of acute angle and obtuse angle with respect to an arrangement direction of the multiple optical elements; a scanning part which can move at least a part of the imaging optical system 6 with respect to a surface to be measured; and a position information acquisition part for acquiring position information of the surface to be measured on the basis of position information of the scanning part and image information of the image pickup device 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
