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发明名称
用于具有低间隙填充纵横比的快闪装置之整合处理流程
摘要
本发明揭示一种非挥发性记忆体,其经形成而于浮动闸极之间具有浅沟渠隔离结构,并在浅沟渠隔离介电质遭蚀刻处具有延伸于浮动闸极之间的控制闸极。运用离子植入以产生一与该下方介电质相比具有高蚀刻率的介电层可达成对每一深度的控制。在植入期间,会有一传导层覆盖于该基板之上。一于记忆体阵列中具有小型多晶矽特征且于周边区中具有大型多晶矽特征之基板系运用于该周边区之突出物与一会在移除突出物后立即停止之软式化学机械研磨步骤而确切地平坦化。
申请公布号
TWI384588
申请公布日期
2013.02.01
申请号
TW095138445
申请日期
2006.10.18
申请人
桑迪士克科技公司 美国
发明人
杜安D 法;东谷雅明
分类号
H01L21/8247;H01L27/04
主分类号
H01L21/8247
代理机构
代理人
黄章典 台北市松山区敦化北路201号7楼
主权项
地址
美国
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