| 摘要 |
<P>PROBLEM TO BE SOLVED: To acquire correction information capable of cancelling positional deviations caused by movement of a unit holding part by a movement mechanism, even in a state in which a probe unit is not held by the unit holding part. <P>SOLUTION: A correction information acquisition method comprises the steps of: controlling the movement mechanism in accordance with movement control information Dp to move a test head holding part 6 provided with a position specifying mark 6m to a position where "second imaging processing" is executed (step 56(56a)); controlling a camera 5 to execute the "second imaging processing" in which the test head holding part 6 is imaged and imaging data D2 is outputted (step 57); and acquiring an amount of positional deviations between a position of a mark 6m specified based on the imaging data D2 and a position of a mark 6m specified based on "holding part mark position information", and a direction of the positional deviations therebetween, as correction information Dr for correcting the movement control information Dp used in "probing processing", to allow a storage section to store them (steps 58 and 59). <P>COPYRIGHT: (C)2013,JPO&INPIT |
